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Design and microfabrication of bioMEMS, pressure sensor arrays, gas sensors, bi - NJ Institute of Technology

Contact Information
Contact Name:    Dentcho Ivanov
Phone:    (973)596-5696, (973)642-7553
Email:    
Website:    http://mfc.njit.edu/
Address:    121 Summit Street, Room 200, Newark, NJ 07102
University:    NJ Institute of Technology
Institute:    Microelectronics Fabrication Center
Department:    Biomedical Engineering
Category:    Microfluids
Topic:
Design and microfabrication of bioMEMS, pressure sensor arrays, gas sensors, biomolecular sensors for protein and nucleic acids detection, integrated electronics and optoelectronics circuits, biomedical actuators and implant devices, microfluidic devices.
Synopsis:

Development of micro- and nano- fabrication techniques using silicon, glass, ceramics, semiconductors, and ion conducting thin-film and bulk materials for biomedical applications.

Asset(s):    ISO 4 Class 10 Clean room, Class 100 Clean room
Asset Desscription:    Equipped for microfabrication of 3-, 4-, 5-, and 6-inch silicon, glass, ceramic, and polymer wafers, Isotropic and anisotropic chemical etching, Reactive Ion Etching (RIE), DRIE, DC reactive magnetron sputtering of metal thin films, E-beam evaporation, Wafer bonding, 0.7 micron photolithography, High-temperature furnaces of silicon oxidation, Plasma Enhanced Chemical Vapor Deposition (PECVD), SiN, SiO2, a-Si, Low Pressure Chemical Vapor Deposition (LPCVD)
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